公开(公告)号：US20110316054A1

公开(公告)日：2011-12-29

申请号：US13152450

申请日：2011-06-03

Applicant: Gary Fedder ,  Nathan Lazarus

Inventor： Gary Fedder ,  Nathan Lazarus

IPC: H01L27/092 ,  H01L21/02

CPC classification number: G01N27/4141 ,  B81B2201/0214 ,  B81C1/00246 ,  B81C2203/0714 ,  C23F1/20 ,  G01N27/226 ,  G01N27/4148 ,  H01L28/60

Abstract: A method for fabrication of capacitive environment sensors is provided in which the sensor elements are integrated in a CMOS structure with electronics through the use of complementary metal oxide semiconductor (CMOS) fabrication methods. Also provided are environment sensors fabricated, for example, by the method, and a measurement system using the environment sensors fabricated by the method. The described method includes etching away one of the metal layers in a CMOS chip to create a cavity. This cavity is then filled with an environment-sensitive dielectric material to form a sensing capacitor between plates formed by the metal adhesion layers or an array of contacts from other metal layers of the CMOS structure. This approach provides improved sensing capabilities in a system that is easily manufactured.

Abstract translation: 提供了一种用于制造电容式环境传感器的方法，其中传感器元件通过使用互补金属氧化物半导体（CMOS）制造方法集成在具有电子学的CMOS结构中。 还提供了例如通过该方法制造的环境传感器，以及使用通过该方法制造的环境传感器的测量系统。 所描述的方法包括蚀刻掉CMOS芯片中的一个金属层以形成空腔。 然后用环境敏感介电材料填充该空腔，以在由金属粘附层形成的板之间形成感测电容器，或者由CMOS结构的其它金属层形成的触点阵列。 这种方法在易于制造的系统中提供改进的感测能力。

公开(公告)号：US20110180884A1

公开(公告)日：2011-07-28

申请号：US13010954

申请日：2011-01-21

Applicant: Nathan Lazarus ,  Gary Fedder ,  Sarah Bedair ,  Chiung Lo

Inventor： Nathan Lazarus ,  Gary Fedder ,  Sarah Bedair ,  Chiung Lo

IPC: H01L29/66 ,  H01L21/02

CPC classification number: H01L28/40 ,  G01N27/227

Abstract: A capacitive chemical sensor, along with methods of making and using the sensor are provided. The sensors described herein eliminate undesirable capacitance by etching away the substrate underneath the capacitive chemical sensor, eliminating most of the substrate capacitance and making changes in the chemical-sensitive layer capacitance easier to detect.

Abstract translation: 提供电容化学传感器，以及制造和使用传感器的方法。 本文所述的传感器通过蚀刻掉电容化学传感器下面的衬底来消除不需要的电容，从而消除了大部分衬底电容，并使化学敏感层电容的变化更易于检测。

公开(公告)号：US08471304B2

公开(公告)日：2013-06-25

申请号：US13152450

申请日：2011-06-03

Applicant: Gary Fedder ,  Nathan Lazarus

Inventor： Gary Fedder ,  Nathan Lazarus

IPC: H01L29/66

CPC classification number: G01N27/4141 ,  B81B2201/0214 ,  B81C1/00246 ,  B81C2203/0714 ,  C23F1/20 ,  G01N27/226 ,  G01N27/4148 ,  H01L28/60

Abstract: A method for fabrication of capacitive environment sensors is provided in which the sensor elements are integrated in a CMOS structure with electronics through the use of complementary metal oxide semiconductor (CMOS) fabrication methods. Also provided are environment sensors fabricated, for example, by the method, and a measurement system using the environment sensors fabricated by the method. The described method includes etching away one of the metal layers in a CMOS chip to create a cavity. This cavity is then filled with an environment-sensitive dielectric material to form a sensing capacitor between plates formed by the metal adhesion layers or an array of contacts from other metal layers of the CMOS structure. This approach provides improved sensing capabilities in a system that is easily manufactured.

Abstract translation: 提供了一种用于制造电容式环境传感器的方法，其中传感器元件通过使用互补金属氧化物半导体（CMOS）制造方法集成在具有电子学的CMOS结构中。 还提供了例如通过该方法制造的环境传感器，以及使用通过该方法制造的环境传感器的测量系统。 所描述的方法包括蚀刻掉CMOS芯片中的一个金属层以形成空腔。 然后用环境敏感介电材料填充该空腔，以在由金属粘附层形成的板之间形成感测电容器，或者由CMOS结构的其它金属层形成的触点阵列。 这种方法在易于制造的系统中提供改进的感测能力。

公开(公告)号：US08410562B2

公开(公告)日：2013-04-02

申请号：US13010954

申请日：2011-01-21

Applicant: Nathan Lazarus ,  Gary Fedder ,  Sarah Bedair ,  Chiung Lo

Inventor： Nathan Lazarus ,  Gary Fedder ,  Sarah Bedair ,  Chiung Lo

IPC: H01L27/14

CPC classification number: H01L28/40 ,  G01N27/227

Abstract: A capacitive chemical sensor, along with methods of making and using the sensor are provided. The sensors described herein eliminate undesirable capacitance by etching away the substrate underneath the capacitive chemical sensor, eliminating most of the substrate capacitance and making changes in the chemical-sensitive layer capacitance easier to detect.

Abstract translation: 提供电容化学传感器，以及制造和使用传感器的方法。 本文所述的传感器通过蚀刻掉电容化学传感器下面的衬底来消除不需要的电容，从而消除了大部分衬底电容，并使化学敏感层电容的变化更易于检测。