A layout of dummy patterns on a wafer having a plurality of pads disposed thereon is described. The layout of the dummy patterns includes having a plurality of dummy patterns spaced apart from each other and enclosing the plurality of the pads. The plurality of dummy patterns also include a plurality of peripheral dummy patterns and a plurality of central dummy patterns, wherein a minimum distance between the plurality of the central dummy patterns and the plurality of the pads is greater a minimum distance between the plurality of the peripheral dumpy patterns and the plurality of the pads.