Invention Grant
- Patent Title: Processing system
- Patent Title (中): 处理系统
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Application No.: US13451734Application Date: 2012-04-20
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Publication No.: US08415644B2Publication Date: 2013-04-09
- Inventor: Fabian Perez-Willard
- Applicant: Fabian Perez-Willard
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Fish & Richardson P.C.
- Priority: DE102011018460 20110421
- Main IPC: H01J37/305
- IPC: H01J37/305

Abstract:
A processing system includes a piping which extends annularly, such as in the form of a circular annular shape, around a beam path between a focusing lens and an interaction region. The piping includes, on a side which faces the interaction region, a plurality of exit openings for the gas towards the interaction region. The piping also includes a holder configured to pivot the piping about a pivot axis. The holder is parallel to the tilt axis of the object holder.
Public/Granted literature
- US20120267545A1 PROCESSING SYSTEM Public/Granted day:2012-10-25
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