Invention Grant
- Patent Title: Charged-particle energy analyzer
- Patent Title (中): 带电粒子能量分析仪
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Application No.: US13119689Application Date: 2010-07-16
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Publication No.: US08421030B2Publication Date: 2013-04-16
- Inventor: Khashayar Shadman , Robert Haynes , Gabor D. Toth , Christopher Sears , Mehran Nasser Ghodsi
- Applicant: Khashayar Shadman , Robert Haynes , Gabor D. Toth , Christopher Sears , Mehran Nasser Ghodsi
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Okamoto & Benedicto LLP
- International Application: PCT/US2010/042313 WO 20100716
- International Announcement: WO2011/009065 WO 20110120
- Main IPC: G01K1/08
- IPC: G01K1/08

Abstract:
One embodiment relates to a charged-particle energy analyzer apparatus. A first mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a first electrode is arranged such that a first cavity is formed between the second side of the first mesh and the first electrode. A second mesh is arranged to receive the charged particles on a second side and pass the charged particles to a first side, and a second electrode is arranged such that a second cavity is formed between the first side of the second mesh and the second electrode. Finally, a third mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a position-sensitive charged-particle detector is arranged to receive the charged particles after the charged particles pass through the third mesh.
Public/Granted literature
- US20110168886A1 CHARGED-PARTICLE ENERGY ANALYZER Public/Granted day:2011-07-14
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