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US08427251B2 Temperature compensated oscillator including MEMS resonator for frequency control 有权
温度补偿振荡器包括用于频率控制的MEMS谐振器

Temperature compensated oscillator including MEMS resonator for frequency control
Abstract:
Disclosed is an oscillator that relies on redundancy of similar resonators integrated on chip in order to fulfill the requirement of one single quartz resonator. The immediate benefit of that approach compared to quartz technology is the monolithic integration of the reference signal function, implying smaller devices as well as cost and power savings.
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