Invention Grant
US08429954B2 Monolithic comb drive system and method for large-deflection multi-DOF microtransduction
失效
用于大偏转多自由度微转移的单片梳驱动系统和方法
- Patent Title: Monolithic comb drive system and method for large-deflection multi-DOF microtransduction
- Patent Title (中): 用于大偏转多自由度微转移的单片梳驱动系统和方法
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Application No.: US12456759Application Date: 2009-06-22
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Publication No.: US08429954B2Publication Date: 2013-04-30
- Inventor: Jason Vaughn Clark
- Applicant: Jason Vaughn Clark
- Applicant Address: US IN West Lafatette
- Assignee: Purdue Research Foundation
- Current Assignee: Purdue Research Foundation
- Current Assignee Address: US IN West Lafatette
- Agency: Faegre Baker Daniels LLP
- Main IPC: G01B5/28
- IPC: G01B5/28
Abstract:
A scanning probe microscope includes a plate moveable in an x-axis direction, a y-axis direction, and a z-axis direction, and a probe tip coupled to the plate. A plurality of actuators cooperate to move the probe tip with three degrees of freedom of movement.
Public/Granted literature
- US20100064395A1 Monolithic Comb Drive System and method for Large-Deflection Multi-Dof Microtransduction Public/Granted day:2010-03-11
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