Invention Grant
US08436318B2 Apparatus for controlling the temperature of an RF ion source window
失效
用于控制RF离子源窗口的温度的装置
- Patent Title: Apparatus for controlling the temperature of an RF ion source window
- Patent Title (中): 用于控制RF离子源窗口的温度的装置
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Application No.: US12754258Application Date: 2010-04-05
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Publication No.: US08436318B2Publication Date: 2013-05-07
- Inventor: Frank Sinclair , Costel Biloiu , Bon-Woong Koo , Victor Benveniste , Shardul Patel
- Applicant: Frank Sinclair , Costel Biloiu , Bon-Woong Koo , Victor Benveniste , Shardul Patel
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J27/00
- IPC: H01J27/00
Abstract:
An RF ion source utilizing a heating/RF-shielding element for controlling the temperature of an RF window and to act as an RF shielding element for the RF ion source. When the heating/RF shielding element is in a heating mode, it suppresses formation of unwanted deposits on the RF window which negatively impacts the transfer of RF energy from an RF antenna to a plasma chamber. When the heating/RF-shielding element is in a shielding mode, it provides an electrostatic shielding for the RF ion source.
Public/Granted literature
- US20110240876A1 APPARATUS FOR CONTROLLING THE TEMPERATURE OF AN RF ION SOURCE WINDOW Public/Granted day:2011-10-06
Information query
