Invention Grant
US08436994B2 Fast sample height, AOI and POI alignment in mapping ellipsometer or the like
有权
快速样品高度，AOI和POI校准在映射椭偏仪等
- Patent Title: Fast sample height, AOI and POI alignment in mapping ellipsometer or the like
- Patent Title (中): 快速样品高度，AOI和POI校准在映射椭偏仪等
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Application No.: US12930762Application Date: 2011-01-15
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Publication No.: US08436994B2Publication Date: 2013-05-07
- Inventor: Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
- Applicant: Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
- Applicant Address: US NE Lincoln
- Assignee: J.A. Woollam Co., Inc
- Current Assignee: J.A. Woollam Co., Inc
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00
Abstract:
A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
Public/Granted literature
- US20110109906A1 Fast sample height, AOI and POI alignment in mapping ellipsometer or the like Public/Granted day:2011-05-12
Information query
