Invention Grant
- Patent Title: Apparatus and method for enhancing the electromagnetic signal of a sample
- Patent Title (中): 用于增强样品的电磁信号的装置和方法
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Application No.: US12787702Application Date: 2010-05-26
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Publication No.: US08436996B2Publication Date: 2013-05-07
- Inventor: Wen-Li Wu , Shuhul Kang
- Applicant: Wen-Li Wu , Shuhul Kang
- Main IPC: G01J4/00
- IPC: G01J4/00
Abstract:
The present invention is an apparatus and method for enhancing the electromagnetic signal of a sample for ellipsometry which uses at least one auxiliary layer and at least one substrate layer.
Public/Granted literature
- US20100315627A1 Apparatus and Method for Enhancing the Electromagnetic Signal of a Sample Public/Granted day:2010-12-16
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