Invention Grant
US08456632B2 Vectorial polarimetry method and apparatus for analyzing the three-dimensional electromagnetic field resulting from an interaction between a focused illuminating field and a sample to be observed 失效
用于分析聚焦照明场和要观察的样品之间的相互作用产生的三维电磁场的矢量偏振方法和装置

  • Patent Title: Vectorial polarimetry method and apparatus for analyzing the three-dimensional electromagnetic field resulting from an interaction between a focused illuminating field and a sample to be observed
  • Patent Title (中): 用于分析聚焦照明场和要观察的样品之间的相互作用产生的三维电磁场的矢量偏振方法和装置
  • Application No.: US12598583
    Application Date: 2008-04-28
  • Publication No.: US08456632B2
    Publication Date: 2013-06-04
  • Inventor: John Christopher DaintyOscar Gabriel RodriguezDavid Lara Saucedo
  • Applicant: John Christopher DaintyOscar Gabriel RodriguezDavid Lara Saucedo
  • Agency: Lewis Kohn & Fitzwilliam LLP
  • Agent David M. Kohn; Kari Moyer-Henry
  • Priority: EP07107376 20070502
  • International Application: PCT/EP2008/055191 WO 20080428
  • International Announcement: WO2008/135438 WO 20081113
  • Main IPC: G01J4/00
  • IPC: G01J4/00
Vectorial polarimetry method and apparatus for analyzing the three-dimensional electromagnetic field resulting from an interaction between a focused illuminating field and a sample to be observed
Abstract:
A method and apparatus for analysing the three-dimensional electromagnetic field resulting from an interaction between a focused illuminating beam and a sample to be observed, by characterising the distribution of the state of polarization of light across a measurement plane, the method comprising the steps of generating a beam of illuminating light; controlling the state of polarization at different positions across the beam width of the light beam; focussing said illuminating light beam to a focus, wherein said focus is a tight focus and said focused light has a suitable three-dimensional vectorial structure at the focus; detecting and measuring the state of polarization of the reflected light at different positions across the width of the measurement plane to retrieve information on the three-dimensional vectorial electromagnetic interaction of the illuminated focused field and the sample.
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