Invention Grant
US08462335B2 System for analyzing a low-pressure gas by optical emission spectroscopy
有权
用于通过光发射光谱分析低压气体的系统
- Patent Title: System for analyzing a low-pressure gas by optical emission spectroscopy
- Patent Title (中): 用于通过光发射光谱分析低压气体的系统
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Application No.: US12733371Application Date: 2008-07-22
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Publication No.: US08462335B2Publication Date: 2013-06-11
- Inventor: Julien Bounouar , Smail Hadj-Rabah
- Applicant: Julien Bounouar , Smail Hadj-Rabah
- Applicant Address: FR Paris
- Assignee: Alcatel Lucent
- Current Assignee: Alcatel Lucent
- Current Assignee Address: FR Paris
- Agency: Carmen Patti Law Group, LLC
- Priority: FR0757203 20070827
- International Application: PCT/EP2008/059614 WO 20080722
- International Announcement: WO2009/027156 WO 20090305
- Main IPC: G01J3/30
- IPC: G01J3/30

Abstract:
The object of the invention is a system for analyzing gases which are at a pressure on the order of a secondary vacuum. The system includes a gas ionization device that includes a cathode having conducting walls defining a cylindrical volume and a disc including at least one central through hole, an anode placed substantially at the center of the hole, a plasma source, the plasma being generated in the cylindrical volume by the combined action of an electric field and a magnetic field, orthogonal to the electric field, a system for collecting the light radiation emitted by the plasma, a cylindrical cavity coaxial to the anode having a conductance lower than that of the cylindrical volume and arranged between the ionization device and the collector system, and an analysis device for the ionized gases including an optical spectrometer for analyzing the evolution of the radiating spectrum. Preferably, the end of the cavity opposite the cylindrical volume is closed by a window that is transparent to the light radiation emitted by the plasma.
Public/Granted literature
- US20100277724A1 SYSTEM FOR ANALYZING A LOW-PRESSURE GAS BY OPTICAL EMISSION SPECTROSCOPY Public/Granted day:2010-11-04
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