Invention Grant
- Patent Title: Mounting for deviation angle self compensating substantially achromatic retarder
- Patent Title (中): 安装偏移角自补偿基本上消色差延迟器
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Application No.: US13065090Application Date: 2011-03-14
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Publication No.: US08462341B2Publication Date: 2013-06-11
- Inventor: Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
- Applicant: Ping He , Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer , Martin M. Liphardt
- Applicant Address: US NE Lincoln
- Assignee: J.A. Woollam Co., Inc.
- Current Assignee: J.A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00
Abstract:
A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
Public/Granted literature
- US20110188040A1 Mounting for deviation angle self compensating substantially achromatic retarder Public/Granted day:2011-08-04
Information query
