Invention Grant
US08481350B2 Asymmetric DBR pairs combined with periodic and modulation doping to maximize conduction and reflectivity, and minimize absorption
有权
非对称DBR对与周期性和调制掺杂结合,以最大限度地提高传导和反射率,并使吸收最小化
- Patent Title: Asymmetric DBR pairs combined with periodic and modulation doping to maximize conduction and reflectivity, and minimize absorption
- Patent Title (中): 非对称DBR对与周期性和调制掺杂结合,以最大限度地提高传导和反射率,并使吸收最小化
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Application No.: US13537340Application Date: 2012-06-29
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Publication No.: US08481350B2Publication Date: 2013-07-09
- Inventor: Ralph H. Johnson , James Guenter
- Applicant: Ralph H. Johnson , James Guenter
- Applicant Address: US CA Sunnyvale
- Assignee: Finisar Corporation
- Current Assignee: Finisar Corporation
- Current Assignee Address: US CA Sunnyvale
- Agency: Maschoff Brennan
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Methods for fabricating an optical device that exhibits improved conduction and reflectivity, and minimized absorption. Steps include forming a plurality of mirror periods designed to reflect an optical field having peaks and nulls. The formation of a portion of the plurality of minor periods includes forming a first layer having a thickness of less than one-quarter wavelength of the optical field; forming a first compositional ramp on the first layer; and forming a second layer on the compositional ramp, the second layer having a different index of refraction than the first layer and having a thickness such that the nulls of the optical field occur within the second layer and not within the compositional ramp, and wherein forming the second layer further comprises heavily doping the second layer at a location of the nulls of the optical field.
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