Invention Grant
- Patent Title: Method to fabricate a mould for lithography by nano-imprinting
- Patent Title (中): 通过纳米压印制造光刻模具的方法
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Application No.: US12715738Application Date: 2010-03-02
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Publication No.: US08486514B2Publication Date: 2013-07-16
- Inventor: Stéfan Landis , Yves Morand
- Applicant: Stéfan Landis , Yves Morand
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomque
- Current Assignee: Commissariat a l'Energie Atomque
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0951337 20090303
- Main IPC: B32B3/28
- IPC: B32B3/28 ; B32B3/30

Abstract:
A nano-imprint device including at least: a substrate, having a surface, on the substrate, a plurality of nano-trenches parallel two by two, each nano-trench extending in a longitudinal direction and being delimited laterally by side walls, the nano-trenches and the side walls being directed substantially perpendicular to the surface of the substrate, each nano-trench comprising a bottom surface with at least one first and one second level in a direction perpendicular to the substrate, respectively of depth h1 and h2>h1, measured relative to the top of the side walls, and the bottom surfaces of the nano-trenches, of the least deep level (h1) being in a first type of material, the side walls being in a second type of material.
Public/Granted literature
- US20100227125A1 METHOD TO FABRICATE A MOULD FOR LITHOGRAPHY BY NANO-IMPRINTING Public/Granted day:2010-09-09
Information query
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