Invention Grant
- Patent Title: Method in the microelectronics fields of forming a monocrystalline layer
- Patent Title (中): 微电子领域形成单晶层的方法
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Application No.: US13125951Application Date: 2009-10-29
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Publication No.: US08501589B2Publication Date: 2013-08-06
- Inventor: Franck Fournel , Thomas Signamarcheix , Laurent Clavelier , Chrystel Deguet
- Applicant: Franck Fournel , Thomas Signamarcheix , Laurent Clavelier , Chrystel Deguet
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Brinks Hofer Gilson & Lione
- Priority: FR0806071 20081031
- International Application: PCT/FR2009/052096 WO 20091029
- International Announcement: WO2010/049657 WO 20100506
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A process for forming a thin film of a given material includes providing a first substrate having, on the surface, an amorphous and/or polycrystalline film of the given material and a second substrate is bonded to the first substrate by hydrophobic direct bonding (molecular adhesion), the second substrate having a single-crystal reference film of a given crystallographic orientation on the surface thereof. A heat treatment is applied at least to the amorphous and/or polycrystalline film, where the heat treatment causes at least a portion of the amorphous and/or polycrystalline film to undergo solid-phase recrystallization along the crystallographic orientation of the reference film, where the reference film acts as a recrystallization seed. The at least partly recrystallized film is then separated from at least a portion of the reference film.
Public/Granted literature
- US20110201177A1 METHOD IN THE MICROELECTRONICS FIELDS OF FORMING A MONOCRYSTALLINE LAYER Public/Granted day:2011-08-18
Information query
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