Invention Grant
- Patent Title: Low volatility polymers for two-stage deposition processes
- Patent Title (中): 用于两阶段沉积工艺的低挥发性聚合物
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Application No.: US11742224Application Date: 2007-04-30
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Publication No.: US08529993B2Publication Date: 2013-09-10
- Inventor: Robert Bruce Charters , Dax Kukulj
- Applicant: Robert Bruce Charters , Dax Kukulj
- Applicant Address: US DE Wilmington
- Assignee: Zetta Research andDevelopment LLC—RPO Series
- Current Assignee: Zetta Research andDevelopment LLC—RPO Series
- Current Assignee Address: US DE Wilmington
- Agency: Mattingly & Malur, PC
- Main IPC: B05D3/12
- IPC: B05D3/12 ; B05D3/06
Abstract:
This invention relates to materials and processes for the preparation of high quality layers, for example for the fabrication of optical devices such as waveguides. In particular, the invention relates to the use of low volatility polymer materials for the deposition of high quality layers on large area substrates via a two-stage process, for example extrude-and-spin.
Public/Granted literature
- US20080014367A1 Low Volatility Polymers for Two-Stage Deposition Processes Public/Granted day:2008-01-17
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