Invention Grant
US08530835B2 Imaging energy filter for electrically charged particles and spectroscope having same 失效
用于带电粒子的成像能量过滤器和具有其的分光镜

  • Patent Title: Imaging energy filter for electrically charged particles and spectroscope having same
  • Patent Title (中): 用于带电粒子的成像能量过滤器和具有其的分光镜
  • Application No.: US13389923
    Application Date: 2010-08-31
  • Publication No.: US08530835B2
    Publication Date: 2013-09-10
  • Inventor: Dietmar Funnemann
  • Applicant: Dietmar Funnemann
  • Agency: Morgan, Lewis & Bockius LLP
  • Priority: DE102009044989 20090924
  • International Application: PCT/EP2010/062724 WO 20100831
  • International Announcement: WO2011/036038 WO 20110331
  • Main IPC: H01J49/00
  • IPC: H01J49/00
Imaging energy filter for electrically charged particles and spectroscope having same
Abstract:
The present invention concerns an imaging energy filter for electrically charged particles with a toroidal energy analyzer, preferably with a hemispherical analyzer, with an entrance plane and an exit plane. To provide an imaging energy filter and a spectroscope having such an imaging energy filter, which has a higher degree of position and angle resolution and which can be operated with a greater acceptance angle, it is proposed according to the invention that a mirror element for electrically charged particles is provided and is so arranged that charged particles which leave the toroidal energy analyzer by way of the exit plane are reflected back into the toroidal energy analyzer by the mirror element so that the charged particles pass through the toroidal energy analyzer a further time in the opposite travel direction.
Information query
Patent Agency Ranking
0/0