Invention Grant
US08541755B1 Electron microscope 失效
电子显微镜

Electron microscope
Abstract:
An electron microscope is offered which can correct chromatic and spherical aberrations without producing residual aberrations. In this microscope, a chromatic aberration-correcting optical system and a spherical aberration-correcting optical system are connected in series (in tandem) via a connection system. That is, the chromatic aberration-correcting optical system and the spherical aberration-correcting optical system are configured independently. Chromatic and spherical aberrations are corrected separately.
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