Invention Grant
- Patent Title: Electron microscope
- Patent Title (中): 电子显微镜
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Application No.: US13467318Application Date: 2012-05-09
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Publication No.: US08541755B1Publication Date: 2013-09-24
- Inventor: Hidetaka Sawada
- Applicant: Hidetaka Sawada
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Main IPC: H01J29/56
- IPC: H01J29/56 ; H01J37/145

Abstract:
An electron microscope is offered which can correct chromatic and spherical aberrations without producing residual aberrations. In this microscope, a chromatic aberration-correcting optical system and a spherical aberration-correcting optical system are connected in series (in tandem) via a connection system. That is, the chromatic aberration-correcting optical system and the spherical aberration-correcting optical system are configured independently. Chromatic and spherical aberrations are corrected separately.
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