Invention Grant
- Patent Title: Method for continuous formation of a purified sheet from a melt
- Patent Title (中): 从熔体中连续形成纯化片材的方法
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Application No.: US12487058Application Date: 2009-06-18
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Publication No.: US08545624B2Publication Date: 2013-10-01
- Inventor: Peter L. Kellerman , Frank Sinclair , Frederick Carlson
- Applicant: Peter L. Kellerman , Frank Sinclair , Frederick Carlson
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: C30B13/28
- IPC: C30B13/28
Abstract:
An apparatus to pump a melt is disclosed. The pump has a chamber that defines a cavity configured to hold the melt. A gas source is in fluid communication with the chamber. A first valve is between the chamber and a first pipe and a second valve is between the chamber and a second pipe. The valves may be check valves in one embodiment.
Public/Granted literature
- US20090315220A1 MELT PURIFICATION AND DELIVERY SYSTEM Public/Granted day:2009-12-24
Information query
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