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US08545945B2 Micropattern generation with pulsed laser diffraction 有权
脉冲激光衍射的微图案生成

Micropattern generation with pulsed laser diffraction
Abstract:
Methods and devices for preparing microscale polymer relief structures from a thin polymer layer on an absorbing substrate are described. The described methods are ultrafast (about 8 nanoseconds) and allow formation of patterned microstructures having complex morphologies and narrow line widths that are an order of magnitude smaller than the masks used in the methods.
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