Invention Grant
- Patent Title: Beam blanker for interrupting a beam of charged particles
- Patent Title (中): 用于中断带电粒子束的光束消除器
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Application No.: US13269385Application Date: 2011-10-07
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Publication No.: US08569712B2Publication Date: 2013-10-29
- Inventor: Guido Martinus Henricus Knippels , Fredericus Bernardus Kiewiet , Hendrik Nicolaas Slingerland , Pieter Kruit , Benjamin John Cook , Jacques Nonhebel
- Applicant: Guido Martinus Henricus Knippels , Fredericus Bernardus Kiewiet , Hendrik Nicolaas Slingerland , Pieter Kruit , Benjamin John Cook , Jacques Nonhebel
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Main IPC: G21K1/08
- IPC: G21K1/08

Abstract:
The invention relates to an electrostatic beam blanker for a particle-optical apparatus, in which the blanker is used to generate a train of pulses with a fixed repetition rate. Such pulse trains with a sub-picosecond pulse length are for example used in the study of chemistry in the femtosecond scale.The beam blanker according to the invention uses a resonant structure, as a result of which the voltage is amplified by the quality factor Q of the resonant structure. During each zero-crossing of the signal, thus twice per period of the resonant frequency, the beam is transmitted, and the beam is blanked during the rest of the time. In a preferred embodiment the resonant structure comprises a transmission line. Impedance matching of signal source and resonant structure may be performed by tuning stubs.
Public/Granted literature
- US20120261586A1 Beam Blanker for Interrupting a Beam of Charged Particles Public/Granted day:2012-10-18
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