Invention Grant
- Patent Title: Wafer inspection system and a method for translating wafers
- Patent Title (中): 晶圆检查系统和晶片翻译方法
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Application No.: US13633142Application Date: 2012-10-02
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Publication No.: US08573077B2Publication Date: 2013-11-05
- Inventor: Itzik Nisany , Amir Gilead , Michael Vainer , Valery Nuzni
- Applicant: Camtek Ltd.
- Applicant Address: US IL Midgal Haemek
- Assignee: Camtek Ltd.
- Current Assignee: Camtek Ltd.
- Current Assignee Address: US IL Midgal Haemek
- Agent Oren Reches
- Main IPC: G01M19/00
- IPC: G01M19/00

Abstract:
A method for inspecting a wafer and a system. The system includes: a chuck; and a robot that includes a movable element connected to a detachable adaptor selected from a group of diced wafer detachable adaptors and non-diced wafer detachable adaptors; wherein a diced wafer detachable adaptor is shaped such to partially surround the diced wafer and comprises at least one vacuum groove adapted to apply vacuum on a tape that supports the diced wafer; and wherein the robot is adapted to fetch the wafer from a cassette and to place the wafer on the chuck.
Public/Granted literature
- US20130115030A1 WAFER INSPECTION SYSTEM AND A METHOD FOR TRANSLATING WAFERS Public/Granted day:2013-05-09
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