Invention Grant
US08573077B2 Wafer inspection system and a method for translating wafers 有权
晶圆检查系统和晶片翻译方法

  • Patent Title: Wafer inspection system and a method for translating wafers
  • Patent Title (中): 晶圆检查系统和晶片翻译方法
  • Application No.: US13633142
    Application Date: 2012-10-02
  • Publication No.: US08573077B2
    Publication Date: 2013-11-05
  • Inventor: Itzik NisanyAmir GileadMichael VainerValery Nuzni
  • Applicant: Camtek Ltd.
  • Applicant Address: US IL Midgal Haemek
  • Assignee: Camtek Ltd.
  • Current Assignee: Camtek Ltd.
  • Current Assignee Address: US IL Midgal Haemek
  • Agent Oren Reches
  • Main IPC: G01M19/00
  • IPC: G01M19/00
Wafer inspection system and a method for translating wafers
Abstract:
A method for inspecting a wafer and a system. The system includes: a chuck; and a robot that includes a movable element connected to a detachable adaptor selected from a group of diced wafer detachable adaptors and non-diced wafer detachable adaptors; wherein a diced wafer detachable adaptor is shaped such to partially surround the diced wafer and comprises at least one vacuum groove adapted to apply vacuum on a tape that supports the diced wafer; and wherein the robot is adapted to fetch the wafer from a cassette and to place the wafer on the chuck.
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