Method for forming semiconductor device

Invention Grant

US08574978B1 Method for forming semiconductor device 有权

Title translation: 半导体器件形成方法

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Patent Title: Method for forming semiconductor device
Patent Title (中): 半导体器件形成方法
Application No.: US13443894

Application Date: 2012-04-11
Publication No.: US08574978B1

Publication Date: 2013-11-05
Inventor: Ching-Wen Hung , Chih-Sen Huang , Ling-Chun Chou , I-Chang Wang
Applicant: Ching-Wen Hung , Chih-Sen Huang , Ling-Chun Chou , I-Chang Wang
Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
Assignee: United Microelectronics Corp.
Current Assignee: United Microelectronics Corp.
Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
Agent Winston Hsu; Scott Margo
Main IPC: H01L21/8238
IPC: H01L21/8238 ; H01L21/336

Abstract:

A method for forming a semiconductor device includes firstly providing a gate structure disposed on a substrate and a first nitride material layer disposed on the gate structure, secondly performing a protective step to modify the first nitride material layer in the presence of oxygen, then forming a second nitride material layer on the substrate, and later performing a removal step to remove the second nitride material layer without substantially slashing the modified first nitride material layer.

Abstract(Chinese):

一种形成半导体器件的方法包括首先提供设置在衬底上的栅极结构和设置在栅极结构上的第一氮化物材料层，其次在氧存在下进行保护步骤以修饰第一氮化物材料层，然后形成第二氮化物材料层，然后执行去除步骤以去除第二氮化物材料层，而不改变第一氮化物材料层。

Public/Granted literature

US20130273706A1 METHOD FOR FORMING SEMICONDUCTOR DEVICE Public/Granted day:2013-10-17

Information query

Espacenet

IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L21/00	专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/70	.由在一共用基片内或其上形成的多个固态组件或集成电路组成的器件或其部件的制造或处理；集成电路器件或其特殊部件的制造（由预制电组件组成的组装件的制造入H05K3/00，H05K13/00）
H01L21/77	..在公共衬底中或上面形成的由许多固态元件或集成电路组成的器件的制造或处理（电可编程只读存储器或其多步骤的制造方法入H01L27/115）
H01L21/78	...把衬底连续地分成多个独立的器件（改变表面物理特性或者半导体形状的切割入H01L21/304）
H01L21/82	....制造器件，例如每一个由许多元件组成的集成电路
H01L21/822	.....衬底是采用硅工艺的半导体的（H01L21/8258优先）
H01L21/8232	......场效应工艺
H01L21/8234	.......MIS工艺
H01L21/8238	........互补场效应晶体管，例如CMOS