Invention Grant
- Patent Title: View-finder in ellipsometer or the like systems
- Patent Title (中): 偏心计或其他系统中的取景器
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Application No.: US13573032Application Date: 2012-08-15
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Publication No.: US08587781B2Publication Date: 2013-11-19
- Inventor: Martin M Liphardt , Ping He
- Applicant: Martin M Liphardt , Ping He
- Applicant Address: US NE Lincoln
- Assignee: J.A. Woollam Co., Inc.
- Current Assignee: J.A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G01N21/00 ; G01N21/55
Abstract:
A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.
Public/Granted literature
- US20120314218A1 View-finder in ellipsometer or the like systems Public/Granted day:2012-12-13
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