Invention Grant
US08587787B2 Miniature fourier transform spectrometer and method of operation 有权
微型傅立叶变换光谱仪及其操作方法

Miniature fourier transform spectrometer and method of operation
Abstract:
A Micro-Electro-Mechanical Systems (MEMS) interferometer is implemented in a Fourier transform spectrometer, which includes a common housing containing the interferometer and a gas cell, possibly including a preconcentrator. The interferometer system includes an optical bench and at least two mirror structures, being patterned from one or more layers on the optical bench and erected to extend substantially perpendicularly to the bench to define two interferometer arms to provide a MEMS interferometer.
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