Invention Grant
- Patent Title: Miniature fourier transform spectrometer and method of operation
- Patent Title (中): 微型傅立叶变换光谱仪及其操作方法
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Application No.: US11966594Application Date: 2007-12-28
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Publication No.: US08587787B2Publication Date: 2013-11-19
- Inventor: David Reyes , E. Robert Schildkraut , Jinhong Kim
- Applicant: David Reyes , E. Robert Schildkraut , Jinhong Kim
- Applicant Address: US MA Marlborough
- Assignee: Block Engineering, LLC
- Current Assignee: Block Engineering, LLC
- Current Assignee Address: US MA Marlborough
- Agency: Houston & Associates, LLP
- Main IPC: G01J3/45
- IPC: G01J3/45

Abstract:
A Micro-Electro-Mechanical Systems (MEMS) interferometer is implemented in a Fourier transform spectrometer, which includes a common housing containing the interferometer and a gas cell, possibly including a preconcentrator. The interferometer system includes an optical bench and at least two mirror structures, being patterned from one or more layers on the optical bench and erected to extend substantially perpendicularly to the bench to define two interferometer arms to provide a MEMS interferometer.
Public/Granted literature
- US20100284017A1 Miniature Fourier Transform Spectrometer and Method of Operation Public/Granted day:2010-11-11
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