Invention Grant
- Patent Title: Wiring substrate, piezoelectric oscillator and gyrosensor
- Patent Title (中): 接线基板,压电振荡器和陀螺仪
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Application No.: US13083806Application Date: 2011-04-11
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Publication No.: US08621926B2Publication Date: 2014-01-07
- Inventor: Tsuyoshi Yoda
- Applicant: Tsuyoshi Yoda
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-107007 20100507
- Main IPC: G01C19/56
- IPC: G01C19/56 ; H01L23/48 ; H01L23/52

Abstract:
A wiring substrate includes: a substrate having a first surface and a second surface; a first insulating layer stacked on the first surface; a pad electrode stacked on the first insulating layer; a through electrode connected to the pad electrode; and a second insulating layer disposed between the substrate and the through electrode and between the first insulating layer and the through electrode, wherein a diameter of the through electrode in a connection section between the pad electrode and the through electrode is smaller than a diameter of the through electrode on the second surface side, the first insulating layer, the second insulating layer and the through electrode overlap with each other in a peripheral area of the connection section, when seen from a plan view, and the thickness of the first insulating layer in the area is thinner than the thickness of the first insulating layer in other areas.
Public/Granted literature
- US20110271757A1 WIRING SUBSTRATE, PIEZOELECTRIC OSCILLATOR, GYROSENSOR AND MANUFACTURING METHOD OF WIRING SUBSTRATE Public/Granted day:2011-11-10
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