Invention Grant
US08621926B2 Wiring substrate, piezoelectric oscillator and gyrosensor 有权
接线基板,压电振荡器和陀螺仪

Wiring substrate, piezoelectric oscillator and gyrosensor
Abstract:
A wiring substrate includes: a substrate having a first surface and a second surface; a first insulating layer stacked on the first surface; a pad electrode stacked on the first insulating layer; a through electrode connected to the pad electrode; and a second insulating layer disposed between the substrate and the through electrode and between the first insulating layer and the through electrode, wherein a diameter of the through electrode in a connection section between the pad electrode and the through electrode is smaller than a diameter of the through electrode on the second surface side, the first insulating layer, the second insulating layer and the through electrode overlap with each other in a peripheral area of the connection section, when seen from a plan view, and the thickness of the first insulating layer in the area is thinner than the thickness of the first insulating layer in other areas.
Information query
Patent Agency Ranking
0/0