Invention Grant
- Patent Title: Integration of ZnO nanowires with nanocrystalline diamond fibers
- Patent Title (中): ZnO纳米线与纳米晶金刚石纤维的集成
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Application No.: US12780566Application Date: 2010-05-14
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Publication No.: US08642123B1Publication Date: 2014-02-04
- Inventor: Ashok Kumar , Manoj Kumar Singh , Sathyaharish Jeedigunta
- Applicant: Ashok Kumar , Manoj Kumar Singh , Sathyaharish Jeedigunta
- Applicant Address: US FL Tampa
- Assignee: University of South Florida
- Current Assignee: University of South Florida
- Current Assignee Address: US FL Tampa
- Agency: Smith & Hopen, P.A.
- Agent Robert J. Varkonyi
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H05K3/02
Abstract:
Provided herein is a method for the synthesis and the integration of ZnO nanowires and nanocrystalline diamond as a novel hybrid material useful in next generation MEMS/NEMS devices. As diamond can provide a highly stable surface for applications in the harsh environments, realization of such hybrid structures may prove to be very fruitful. The ZnO nanowires on NCD were synthesized by thermal evaporation technique.
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