Invention Grant
- Patent Title: Method and system of performing three-dimensional imaging using an electron microscope
- Patent Title (中): 使用电子显微镜进行三维成像的方法和系统
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Application No.: US11926791Application Date: 2007-10-29
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Publication No.: US08642959B2Publication Date: 2014-02-04
- Inventor: Shixin Wang
- Applicant: Shixin Wang
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Leffert Jay & Polglaze, P.A.
- Main IPC: G01N23/00
- IPC: G01N23/00
Abstract:
A method and electron microscope system of performing three-dimensional imaging using an electron microscope. At least some of the illustrative embodiments are methods comprising generating an electron beam, and creating a hollow-cone electron beam (by passing the electron beam through an annular aperture), focusing the hollow-cone electron beam to form a probe, scanning a specimen using the probe; and performing three-dimensional imaging based on the scanning.
Public/Granted literature
- US20090108200A1 Method and System of Performing Three-Dimensional Imaging Using An Electron Microscope Public/Granted day:2009-04-30
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