Invention Grant
- Patent Title: Integrated circuit having microelectromechanical system device and method of fabricating the same
- Patent Title (中): 具有微机电系统装置的集成电路及其制造方法
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Application No.: US12565154Application Date: 2009-09-23
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Publication No.: US08642986B2Publication Date: 2014-02-04
- Inventor: Tzung-Han Tan , Bang-Chiang Lan , Ming-I Wang , Tzung-I Su , Chien-Hsin Huang , Hui-Min Wu , Chao-An Su , Min Chen , Meng-Jia Lin
- Applicant: Tzung-Han Tan , Bang-Chiang Lan , Ming-I Wang , Tzung-I Su , Chien-Hsin Huang , Hui-Min Wu , Chao-An Su , Min Chen , Meng-Jia Lin
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Agent Ding Yu Tan
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/30

Abstract:
An integrated circuit (IC) having a microelectromechanical system (MEMS) device buried therein is provided. The integrated circuit includes a substrate, a metal-oxide semiconductor (MOS) device, a metal interconnect, and the MEMS device. The substrate has a logic circuit region and a MEMS region. The MOS device is located on the logic circuit region of the substrate. The metal interconnect, formed by a plurality of levels of wires and a plurality of vias, is located above the substrate to connect the MOS device. The MEMS device is located on the MEMS region, and includes a sandwich membrane located between any two neighboring levels of wires in the metal interconnect and connected to the metal interconnect.
Public/Granted literature
- US20110068374A1 INTEGRATED CIRCUIT HAVING MICROELECTROMECHANICAL SYSTEM DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2011-03-24
Information query
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