Invention Grant
- Patent Title: Methods of fabricating a transistor gate including cobalt silicide
- Patent Title (中): 制造包括硅化钴的晶体管栅极的方法
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Application No.: US11636192Application Date: 2006-12-08
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Publication No.: US08652912B2Publication Date: 2014-02-18
- Inventor: Yongjun Jeff Hu
- Applicant: Yongjun Jeff Hu
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for fabricating a transistor gate with a conductive element that includes cobalt silicide includes use of a sacrificial material as a place-holder between sidewall spacers of the transistor gate until after high temperature processes, such as the fabrication of raised source and drain regions, have been completed. In addition, semiconductor devices (e.g., DRAM devices and NAND flash memory devices) with transistor gates that include cobalt silicide in their conductive elements are also disclosed, as are transistors with raised source and drain regions and cobalt silicide in the transistor gates thereof. Intermediate semiconductor device structures that include transistor gates with sacrificial material or a gap between upper portions of sidewall spacers are also disclosed.
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