Invention Grant
- Patent Title: Optically pumping to sustain plasma
- Patent Title (中): 光泵浦维持等离子体
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Application No.: US13529539Application Date: 2012-06-21
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Publication No.: US08658967B2Publication Date: 2014-02-25
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine
- Applicant: Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J19/12
- IPC: H01J19/12 ; H05H1/24

Abstract:
A method for sustaining a plasma includes providing a volume of a gas; generating illumination of a first selected wavelength; and forming a first plasma species in a first region of the gas and a second plasma species in a second region of the gas by focusing the illumination of the first wavelength into the volume of gas, the first region having a first average temperature and a first size, the second region having a second average temperature and a second size, the illumination of the first selected wavelength transmitted by the second plasma species, the illumination of the first selected wavelength absorbed by the first plasma species by tuning the first selected wavelength of the illumination to an absorption line of the first plasma species, the absorption line being associated with an ionic absorption transition or an excited neutral transition of the first plasma species.
Public/Granted literature
- US20130001438A1 OPTICALLY PUMPING TO SUSTAIN PLASMA Public/Granted day:2013-01-03
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