Invention Grant
- Patent Title: Selective overtravel during electrical test of probe cards
- Patent Title (中): 探针卡电测试期间的选择性超程
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Application No.: US13647554Application Date: 2012-10-09
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Publication No.: US08659308B1Publication Date: 2014-02-25
- Inventor: James Charles Andersen
- Applicant: Rudolph Technologies, Inc.
- Applicant Address: US NJ Flanders
- Assignee: Rudolph Technolgies, Inc.
- Current Assignee: Rudolph Technolgies, Inc.
- Current Assignee Address: US NJ Flanders
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: G01R31/00
- IPC: G01R31/00
Abstract:
An apparatus and method for conducting electrical testing of probes is disclosed. Probes may also be tested for deflection and loading hysteresis.
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