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公开(公告)号：US08659308B1
公开(公告)日：2014-02-25
申请号：US13647554
申请日：2012-10-09
Applicant: Rudolph Technologies, Inc.
Inventor： James Charles Andersen
IPC: G01R31/00
CPC classification number: G01R35/00
Abstract: An apparatus and method for conducting electrical testing of probes is disclosed. Probes may also be tested for deflection and loading hysteresis.
Abstract translation: 公开了一种用于进行探针电气测试的装置和方法。 也可以测试探头的偏转和负载滞后。
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