Invention Grant
US08664863B2 Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source 有权
向电子源供电的装置和方法,以及离子轰击诱导的二次发射电子源

  • Patent Title: Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source
  • Patent Title (中): 向电子源供电的装置和方法,以及离子轰击诱导的二次发射电子源
  • Application No.: US12812245
    Application Date: 2009-01-08
  • Publication No.: US08664863B2
    Publication Date: 2014-03-04
  • Inventor: Maxime Makarov
  • Applicant: Maxime Makarov
  • Applicant Address: BE Antwerp
  • Assignee: Excico Group
  • Current Assignee: Excico Group
  • Current Assignee Address: BE Antwerp
  • Agency: Young & Thompson
  • Priority: EP08290026 20080111
  • International Application: PCT/FR2009/000017 WO 20090108
  • International Announcement: WO2009/112668 WO 20090917
  • Main IPC: H01J7/24
  • IPC: H01J7/24
Device and method of supplying power to an electron source, and ion-bombardment-induced secondary-emission electron source
Abstract:
The power supply device (14) for an ion-bombardment-induced secondary-emission electron source in a low-pressure chamber includes a control input, two high-voltage outputs, an element for generating a plurality of positive pulses on a high-voltage output, and an element for generating a negative pulse on the other high-voltage output after at least some of the positive pulses.
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