Invention Grant
- Patent Title: Coating device and nozzle managing method
- Patent Title (中): 涂装装置和喷嘴管理方法
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Application No.: US12824006Application Date: 2010-06-25
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Publication No.: US08667924B2Publication Date: 2014-03-11
- Inventor: Tsutomu Sahoda , Futoshi Shimai , Akihiko Sato
- Applicant: Tsutomu Sahoda , Futoshi Shimai , Akihiko Sato
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2009-160041 20090706; JPP2010-140953 20100621
- Main IPC: B05C11/02
- IPC: B05C11/02 ; B05B15/02 ; B05B7/06 ; B05C5/00

Abstract:
A coating device including a coating mechanism which includes nozzles for ejecting a liquid material onto front and rear surfaces of the substrate while rotating a substrate in an upright state, and a nozzle managing mechanism which manages the state of the nozzles, in which the nozzle managing mechanism includes a soaking portion which dips the front end of the nozzle in a soak solution, and a discharging portion which discharges at least the soak solution, and a nozzle managing method.
Public/Granted literature
- US20110008534A1 COATING DEVICE AND NOZZLE MANAGING METHOD Public/Granted day:2011-01-13
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