Invention Grant
- Patent Title: Methods of forming memory arrays
- Patent Title (中): 形成记忆阵列的方法
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Application No.: US13939082Application Date: 2013-07-10
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Publication No.: US08669144B2Publication Date: 2014-03-11
- Inventor: Sanh D. Tang , Janos Fucsko
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/82
- IPC: H01L21/82

Abstract:
Some embodiments include methods of forming memory arrays. A stack of semiconductor material plates may be patterned to subdivide the plates into pieces. Electrically conductive tiers may be formed along sidewall edges of the pieces. The pieces may then be patterned into an array of wires, with the array having vertical columns and horizontal rows. Individual wires may have first ends joining to the electrically conductive tiers, may have second ends in opposing relation to the first ends, and may have intermediate regions between the first and second ends. Gate material may be formed along the intermediate regions. Memory cell structures may be formed at the second ends of the wires. A plurality of vertically-extending electrical interconnects may be connected to the wires through the memory cell structures, with individual vertically-extending electrical interconnects being along individual columns of the array. Some embodiments include memory arrays incorporated into integrated circuitry.
Public/Granted literature
- US20130295726A1 Integrated Memory Arrays, And Methods Of Forming Memory Arrays Public/Granted day:2013-11-07
Information query
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