Invention Grant
- Patent Title: System and method for position control of a mechanical piston in a pump
- Patent Title (中): 泵中机械活塞的位置控制系统和方法
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Application No.: US13301516Application Date: 2011-11-21
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Publication No.: US08678775B2Publication Date: 2014-03-25
- Inventor: George Gonnella , James Cedrone , Iraj Gashgaee
- Applicant: George Gonnella , James Cedrone , Iraj Gashgaee
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Sprinkle IP Law Group
- Main IPC: F04B35/04
- IPC: F04B35/04

Abstract:
Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
Public/Granted literature
- US20120070313A1 SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP Public/Granted day:2012-03-22
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