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US08691334B2 Method of fabricating substrate where patterns are formed 有权
制造图案的基板的制造方法

Method of fabricating substrate where patterns are formed
Abstract:
Provided is a method of fabricating a substrate where patterns are formed, the method including: forming first bonding agent patterns having selective cohesion in a position in which oxide bead patterns are to be formed on a substrate; coating a second bonding agent having larger cohesion with the first bonding agent than cohesion with the substrate, on a plurality of oxide beads, applying the oxide beads, on which the second bonding agent is coated, to the substrate and forming the oxide beads, on which the second bonding agent is coated, on the first bonding agent patterns; and thermally processing the substrate.
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