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US08704353B2 Thermal management of stacked semiconductor chips with electrically non-functional interconnects 有权
具有电功能互连的堆叠半导体芯片的热管理

Thermal management of stacked semiconductor chips with electrically non-functional interconnects
Abstract:
A method of manufacturing is provided that includes fabricating a first plurality of electrically functional interconnects on a front side of a first semiconductor chip and fabricating a first plurality of electrically non-functional interconnects on a back side of the first semiconductor chip. Additional chips may be stacked on the first semiconductor chip.
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