Invention Grant
US08716909B2 Robot with heat dissipating stator 有权
带散热定子的机器人

Robot with heat dissipating stator
Abstract:
A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.
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