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    Robot linear drive heat transfer
    1.
    发明授权
    Robot linear drive heat transfer 有权

    公开(公告)号：US10882194B2

    公开(公告)日：2021-01-05

    申请号：US15294099

    申请日：2016-10-14

    Applicant: Persimmon Technologies, Corp.

    Inventor： Martin Hosek ,  Tuan Ha ,  Christopher Hofmeister

    IPC: H01L21/677 ,  B25J19/00 ,  B25J9/04 ,  H05K7/20 ,  B25J11/00

    Abstract: An apparatus including a movable arm; a robot drive connected to the movable arm; and a heat transfer system. The robot drive includes a first drive configured to extend and retract the movable arm and a second drive configured to move the movable arm and the first drive along a linear path. The heat transfer system includes a first heat transfer member on the base and a second heat transfer member, where the heat transfer system is configured to transfer heat from the first drive to the first heat transfer member and then from the first heat transfer member to the second heat transfer member. The first heat transfer member travels with the base, and the first heat transfer member moves relative to the second heat transfer member as the base moves relative to the slide.

    Robot linear drive heat transfer
    2.
    发明授权
    Robot linear drive heat transfer 有权

    公开(公告)号：US10800050B2

    公开(公告)日：2020-10-13

    申请号：US15841675

    申请日：2017-12-14

    Applicant: Persimmon Technologies, Corp.

    Inventor： Martin Hosek ,  Tuan Ha ,  Christopher Hofmeister

    IPC: H01L21/677 ,  B25J19/00 ,  B25J9/04 ,  H05K7/20 ,  B25J11/00

    Abstract: An apparatus including a movable arm; a robot drive connected to the movable arm; and a heat transfer system. The robot drive includes a first drive configured to extend and retract the movable arm and a second drive configured to move the movable arm and the first drive along a linear path. The heat transfer system includes a first heat transfer member on the base and a second heat transfer member, where the heat transfer system is configured to transfer heat from the first drive to the first heat transfer member and then from the first heat transfer member to the second heat transfer member. The first heat transfer member travels with the base, and the first heat transfer member moves relative to the second heat transfer member as the base moves relative to the slide.

    Robot with heat dissipating stator
    5.
    发明授权
    Robot with heat dissipating stator 有权
    带散热定子的机器人

    公开(公告)号：US08716909B2

    公开(公告)日：2014-05-06

    申请号：US13744966

    申请日：2013-01-18

    Applicant: Persimmon Technologies, Corp.

    Inventor： Martin Hosek ,  Tuan Ha ,  Christopher Hofmeister ,  Dennis Poole

    IPC: H02K1/32

    CPC classification number: H02K5/128 ,  H02K3/30 ,  H02K3/44 ,  H02K5/00 ,  H02K5/225 ,  H02K9/22 ,  H02K15/12 ,  H02K21/44 ,  H02K41/033 ,  Y10S901/23

    Abstract: A substrate transport apparatus including a drive section and a first movable arm assembly. The drive section includes a first motor. The first motor includes a stator and a passive rotor. The first movable arm assembly is connected to the first motor. The substrate transport apparatus is configured for the first movable arm assembly to be positionable in a vacuum chamber with the passive rotor being in communication with an environment inside the vacuum chamber.

    Abstract translation: 一种基板输送装置，包括驱动部和第一可动臂组件。 驱动部分包括第一马达。 第一电动机包括定子和无源转子。 第一可动臂组件连接到第一电动机。 衬底输送装置被配置为使第一可动臂组件可定位在真空室中，其中被动转子与真空室内的环境连通。

    Robot with wrist and end effector different materials
    7.
    发明授权
    Robot with wrist and end effector different materials 有权

    公开(公告)号：US10005190B2

    公开(公告)日：2018-06-26

    申请号：US14956678

    申请日：2015-12-02

    Applicant: Persimmon Technologies, Corp.

    Inventor： Tuan Ha

    IPC: B25J19/00 ,  B25J9/00 ,  H01L21/677 ,  H01L21/687

    CPC classification number: B25J19/0054 ,  B25J9/0009 ,  H01L21/67742 ,  H01L21/68707 ,  Y10S901/29 ,  Y10S901/39

    Abstract: An apparatus including a robot arm comprising a wrist, and an end effector. The wrist includes a frame member. The frame member includes a first material having a first coefficient of thermal expansion. The end effector is connected to the wrist at a connection. The end effector is configured to support a substrate thereon. The end effector includes a first member and a second member. At least one of the first and second members has a different second material with a different second coefficient of thermal expansion. The connection includes the first and second members being stationarily attached to each other with a portion of the frame member sandwiched therebetween. The connection is configured to substantially prevent the different respective coefficients of thermal expansion to deflect the end effector relative to the wrist when the end effector and wrist are heated and/or cooled.

    Robot Linear Drive Heat Transfer
    8.
    发明申请
    Robot Linear Drive Heat Transfer 审中-公开

    公开(公告)号：US20180104830A1

    公开(公告)日：2018-04-19

    申请号：US15841546

    申请日：2017-12-14

    Applicant: Persimmon Technologies, Corp.

    Inventor： Martin Hosek ,  Tuan Ha ,  Christopher Hofmeister

    IPC: B25J19/00 ,  H05K7/20 ,  H01F38/14 ,  H01L21/67 ,  B25J11/00 ,  B25J9/04 ,  H01L21/677 ,  H02J50/10

    Abstract: An apparatus including a movable arm; a robot drive connected to the movable arm; and a heat transfer system. The robot drive includes a first drive configured to extend and retract the movable arm and a second drive configured to move the movable arm and the first drive along a linear path. The heat transfer system includes a first heat transfer member on the base and a second heat transfer member, where the heat transfer system is configured to transfer heat from the first drive to the first heat transfer member and then from the first heat transfer member to the second heat transfer member. The first heat transfer member travels with the base, and the first heat transfer member moves relative to the second heat transfer member as the base moves relative to the slide.

    Robot drive and wireless data coupling
    10.
    发明授权
    Robot drive and wireless data coupling 有权

    公开(公告)号：US10792822B2

    公开(公告)日：2020-10-06

    申请号：US15841546

    申请日：2017-12-14

    Applicant: Persimmon Technologies, Corp.

    Inventor： Martin Hosek ,  Tuan Ha ,  Christopher Hofmeister

    IPC: H01L21/677 ,  B25J19/00 ,  B25J9/04 ,  H05K7/20 ,  B25J11/00

    Abstract: An apparatus including a movable arm; a robot drive connected to the movable arm; and a heat transfer system. The robot drive includes a first drive configured to extend and retract the movable arm and a second drive configured to move the movable arm and the first drive along a linear path. The heat transfer system includes a first heat transfer member on the base and a second heat transfer member, where the heat transfer system is configured to transfer heat from the first drive to the first heat transfer member and then from the first heat transfer member to the second heat transfer member. The first heat transfer member travels with the base, and the first heat transfer member moves relative to the second heat transfer member as the base moves relative to the slide.

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