Invention Grant
- Patent Title: Method for discharging chemical solution
- Patent Title (中): 化学溶液的排放方法
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Application No.: US12842585Application Date: 2010-07-23
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Publication No.: US08722135B2Publication Date: 2014-05-13
- Inventor: Fuminori Tateishi
- Applicant: Fuminori Tateishi
- Applicant Address: JP Atsugi-shi, Kanagawa
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2005-170921 20050610
- Main IPC: B05D5/10
- IPC: B05D5/10 ; B05B7/08 ; G03D5/04

Abstract:
An object is to provide a chemical solution application apparatus capable of applying a chemical solution evenly and without irregularity by a spin coating method. A plurality of nozzles are provided for applying a chemical solution to an application object that is fixed over a stage. Each of the nozzles is individually mobile in vertical and horizontal directions. For this reason, controlling a discharging point or pattern is possible, and application responding to a wider viscosity range of chemical solutions is possible. By implementing the present invention, a chemical solution application apparatus equipped with a discharging method of a chemical solution by which a coating film having a small film thickness distribution over an entire substrate and an even thickness can be obtained, as well as for which use efficiency is improved by cutting down on waste of a chemical solution to be discharged.
Public/Granted literature
- US20100285209A1 CHEMICAL SOLUTION APPLICATION APPARATUS AND CHEMICAL SOLUTION APPLICATION METHOD Public/Granted day:2010-11-11
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