Invention Grant
- Patent Title: Ion beam sample preparation apparatus and methods
- Patent Title (中): 离子束样品制备装置及方法
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Application No.: US13867092Application Date: 2013-04-21
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Publication No.: US08729510B2Publication Date: 2014-05-20
- Inventor: Steven Thomas Coyle , John Andrew Hunt
- Applicant: Gatan, Inc.
- Applicant Address: US CA Pleasanton
- Assignee: Gatan Inc.
- Current Assignee: Gatan Inc.
- Current Assignee Address: US CA Pleasanton
- Agent Theodore Heske, III
- Main IPC: H01J37/20
- IPC: H01J37/20

Abstract:
Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. A retention stage lifting means allows the creation of a loading chamber that is isolated from the main vacuum chamber where sample ion beam milling takes place. A heat sink means is configured to conduct heat away from the sample undergoing sample preparation in the ion beam.
Public/Granted literature
- US20130228708A1 Ion Beam Sample Preparation Apparatus and Methods Public/Granted day:2013-09-05
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