Invention Grant
US08729510B2 Ion beam sample preparation apparatus and methods 有权
离子束样品制备装置及方法

  • Patent Title: Ion beam sample preparation apparatus and methods
  • Patent Title (中): 离子束样品制备装置及方法
  • Application No.: US13867092
    Application Date: 2013-04-21
  • Publication No.: US08729510B2
    Publication Date: 2014-05-20
  • Inventor: Steven Thomas CoyleJohn Andrew Hunt
  • Applicant: Gatan, Inc.
  • Applicant Address: US CA Pleasanton
  • Assignee: Gatan Inc.
  • Current Assignee: Gatan Inc.
  • Current Assignee Address: US CA Pleasanton
  • Agent Theodore Heske, III
  • Main IPC: H01J37/20
  • IPC: H01J37/20
Ion beam sample preparation apparatus and methods
Abstract:
Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. A retention stage lifting means allows the creation of a loading chamber that is isolated from the main vacuum chamber where sample ion beam milling takes place. A heat sink means is configured to conduct heat away from the sample undergoing sample preparation in the ion beam.
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