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    Ion beam sample preparation apparatus and methods
    4.
    发明授权
    Ion beam sample preparation apparatus and methods 有权
    离子束样品制备装置及方法

    公开(公告)号：US08791438B2

    公开(公告)日：2014-07-29

    申请号：US13949318

    申请日：2013-07-24

    Applicant: Gatan, Inc.

    Inventor： Steven Thomas Coyle ,  John Andrew Hunt ,  Michael Patrick Hassel-Shearer

    IPC: H01J37/36

    CPC classification number: H01J37/20 ,  G01N1/32 ,  G01N2021/8411 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/184 ,  H01J2237/202 ,  H01J2237/31745

    Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The apparatus has disposed in a vacuum chamber at least one tilting ion beam irradiating means with intensity control, a rotation stage with rotation control, a sample holder, and an adjustable positioning stage that has two axes of positional adjustment that are operable to move the region of the sample being prepared by the ion beam relative to the ion beam. The apparatus may also include a vacuum-tight optical window for observing the sample and a shutter for protecting the optical window from debris while the sample is prepared in the ion beam.

    Abstract translation: 公开了离子束样品制备装置和方法的实施方案。 该设备已经在真空室中设置了至少一个具有强度控制的倾斜离子束照射装置，具有旋转控制的旋转台，样品保持器和可调整的定位台，其具有两个位置调整轴线，该两个轴线可操作以移动该区域 样品由离子束相对于离子束制备。 该装置还可以包括用于观察样品的真空密封光学窗口和用于在样品在离子束中制备样品时保护光学窗口免于碎片的快门。

    Ion Beam Sample Preparation Apparatus and Methods
    5.
    发明申请
    Ion Beam Sample Preparation Apparatus and Methods 有权
    离子束样品制备装置及方法

    公开(公告)号：US20140091237A1

    公开(公告)日：2014-04-03

    申请号：US13949318

    申请日：2013-07-24

    Applicant: Gatan, Inc.

    Inventor： Steven Thomas Coyle ,  John Andrew Hunt ,  Michael Patrick Hassel-Shearer

    IPC: H01J37/20

    CPC classification number: H01J37/20 ,  G01N1/32 ,  G01N2021/8411 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/184 ,  H01J2237/202 ,  H01J2237/31745

    Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The apparatus has disposed in a vacuum chamber at least one tilting ion beam irradiating means with intensity control, a rotation stage with rotation control, a sample holder, and an adjustable positioning stage that has two axes of positional adjustment that are operable to move the region of the sample being prepared by the ion beam relative to the ion beam. The apparatus may also include a vacuum-tight optical window for observing the sample and a shutter for protecting the optical window from debris while the sample is prepared in the ion beam.

    Abstract translation: 公开了离子束样品制备装置和方法的实施方案。 该设备已经在真空室中设置了至少一个具有强度控制的倾斜离子束照射装置，具有旋转控制的旋转台，样品保持器和可调整的定位台，其具有两个位置调整轴线，该两个轴线可操作以移动该区域 样品由离子束相对于离子束制备。 该装置还可以包括用于观察样品的真空密封光学窗口和用于在样品在离子束中制备样品时保护光学窗口免于碎片的快门。

    Ion Beam Sample Preparation Apparatus and Methods
    6.
    发明申请
    Ion Beam Sample Preparation Apparatus and Methods 审中-公开
    离子束样品制备装置及方法

    公开(公告)号：US20140028828A1

    公开(公告)日：2014-01-30

    申请号：US13949369

    申请日：2013-07-24

    Applicant: Gatan, Inc.

    Inventor： John Andrew Hunt ,  Steven Thomas Coyle ,  Michael Patrick Hassel-Sheaer

    IPC: H04N7/18

    CPC classification number: H04N7/18 ,  G01N1/32 ,  G01N23/2251 ,  G01N2021/0162 ,  G01N2021/8416 ,  G02B21/00 ,  H01J37/3005 ,  H01J37/305 ,  H01J37/3053 ,  H01J37/3056 ,  H01J2237/184 ,  H01J2237/202 ,  H01J2237/31745 ,  H01L22/26

    Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues.

    Abstract translation: 公开了离子束样品制备装置和方法的实施方案。 所述方法对设置在真空室中的样品进行操作，并且包括将强度可控的倾斜角度可控离子束引导到与旋转台连接的样品保持器的步骤。 所述方法还包括照亮和捕获样品的一个或多个图像，从一个或多个图像提取有用特征，然后调整样品制备步骤。 公开了用于捕获图像序列，以编程方式旋转图像以及显示具有相似旋转角度的图像序列的其它方法。 其他方法包括从继续离子束制备时可能随时间变化的图像序列中提取有用特征。

    Ion beam sample preparation apparatus and methods
    8.
    发明授权
    Ion beam sample preparation apparatus and methods 有权
    离子束样品制备装置及方法

    公开(公告)号：US09196455B2

    公开(公告)日：2015-11-24

    申请号：US14341842

    申请日：2014-07-27

    Applicant: Gatan, Inc.

    Inventor： Steven Thomas Coyle ,  John Andrew Hunt ,  Michael Patrick Hassel-Shearer

    IPC: H01J37/00 ,  H01J37/20 ,  G01N1/32 ,  H01J37/30 ,  H01J37/305 ,  G01N21/84

    CPC classification number: H01J37/20 ,  G01N1/32 ,  G01N2021/8411 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/184 ,  H01J2237/202 ,  H01J2237/31745

    Abstract: Ion beam sample preparation apparatus and methods are described. The apparatus has disposed in a vacuum chamber at least one tilting ion beam irradiating means with intensity control, a rotation stage with rotation control, a sample holder, and an adjustable positioning stage that has two axes of positional adjustment that are operable to move the region of the sample being prepared by the ion beam relative to the ion beam. The apparatus may also include a vacuum-tight optical window for observing the sample and a shutter for protecting the optical window from debris while the sample is prepared in the ion beam. The apparatus may also include an instrument controller responsive to the state of the apparatus and to the condition of the sample and is operable to control the preparation of the sample.

    Abstract translation: 描述了离子束样品制备装置和方法。 该设备已经在真空室中设置了至少一个具有强度控制的倾斜离子束照射装置，具有旋转控制的旋转台，样品保持器和可调整的定位台，其具有两个位置调整轴线，该两个轴线可操作以移动该区域 样品由离子束相对于离子束制备。 该装置还可以包括用于观察样品的真空密封光学窗口和用于在样品在离子束中制备样品时保护光学窗口免于碎片的快门。 该装置还可以包括响应于装置的状态和样品的状态的仪器控制器，并且可操作以控制样品的制备。

    Ion beam sample preparation apparatus and methods
    9.
    发明授权
    Ion beam sample preparation apparatus and methods 有权
    离子束样品制备装置及方法

    公开(公告)号：US08729510B2

    公开(公告)日：2014-05-20

    申请号：US13867092

    申请日：2013-04-21

    Applicant: Gatan, Inc.

    Inventor： Steven Thomas Coyle ,  John Andrew Hunt

    IPC: H01J37/20

    CPC classification number: H01J37/20 ,  G01N1/32 ,  H01J37/185 ,  H01J37/31 ,  H01J2237/2007 ,  H01J2237/3118

    Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. A retention stage lifting means allows the creation of a loading chamber that is isolated from the main vacuum chamber where sample ion beam milling takes place. A heat sink means is configured to conduct heat away from the sample undergoing sample preparation in the ion beam.

    Abstract translation: 公开了用于使用实施例的离子束样品制备装置和方法的实施方案。 该装置包括在真空室中的离子束照射装置，其可以将离子定向到样品，阻挡部分朝向样品的离子的屏蔽件，以及具有屏蔽保持装置的屏蔽保持台，该屏蔽保持装置可替换地和可移除地将屏蔽保持在 一个位置。 当屏蔽保持在屏蔽保持阶段时，屏蔽具有与屏蔽保持平台上的辅助基准特征相交的基准特征。 保持级提升装置允许创建与主真空室隔离的装载室，其中进行样品离子束研磨。 散热装置被配置为将热量从在离子束中进行样品制备的样品导出。

    Ion Beam Sample Preparation and Coating Apparatus and Methods
    10.
    发明申请
    Ion Beam Sample Preparation and Coating Apparatus and Methods 审中-公开
    离子束样品制备和涂布设备及方法

    公开(公告)号：US20160024645A1

    公开(公告)日：2016-01-28

    申请号：US14809088

    申请日：2015-07-24

    Applicant: Gatan, Inc.

    Inventor： John Andrew Hunt ,  Steven Thomas Coyle ,  Michael Patrick Hassel-Shearer ,  Thijs C. Hosman

    IPC: C23C14/46 ,  C23C14/50 ,  C23C14/54

    Abstract: Disclosed are embodiments of an ion beam sample preparation and coating apparatus and methods. A sample may be prepared in one or more ion beams and then a coating may be sputtered onto the prepared sample within the same apparatus. A vacuum transfer device may be used with the apparatus in order to transfer a sample into and out of the apparatus while in a controlled environment. Various methods to improve preparation and coating uniformity are disclosed including: rotating the sample retention stage; modulating the sample retention stage; variable tilt ion beam irradiating means, more than one ion beam irradiating means, coating thickness monitoring, selective shielding of the sample, and modulating the coating donor holder.

    Abstract translation: 公开了离子束样品制备和涂布装置和方法的实施方案。 可以在一个或多个离子束中制备样品，然后在相同的装置内将涂层溅射到制备的样品上。 真空转移装置可以与该装置一起使用，以便在受控环境中将样品转入和移出装置。 公开了改善制备和涂布均匀性的各种方法，包括：旋转样品保留阶段; 调节样品保留期; 可变倾斜离子束照射装置，多于一个离子束照射装置，涂层厚度监测，样品的选择性屏蔽以及调节涂层供体保持器。

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