Invention Grant
- Patent Title: Coating of shield surfaces in deposition systems
- Patent Title (中): 在沉积系统中涂覆屏蔽表面
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Application No.: US13365070Application Date: 2012-02-02
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Publication No.: US08734907B2Publication Date: 2014-05-27
- Inventor: Vibhu Jindal , Junichi Kageyama
- Applicant: Vibhu Jindal , Junichi Kageyama
- Applicant Address: US NY Albany JP Tokyo
- Assignee: Sematech, Inc.,Asahi Glass Co., Ltd.
- Current Assignee: Sematech, Inc.,Asahi Glass Co., Ltd.
- Current Assignee Address: US NY Albany JP Tokyo
- Agency: Nixon Peabody LLP
- Agent Khaled Shami
- Main IPC: B05D3/10
- IPC: B05D3/10
Abstract:
A deposition chamber shield having a stainless steel coating of from about 100 microns to about 250 microns thick wherein the coated shield has a surface roughness of between about 300 microinches and about 800 microinches and a surface particle density of less than about 0.1 particles/mm2 of particles between about 1 micron and about 5 microns in size and no particles below about 1 micron in size, and process for production thereof is disclosed.
Public/Granted literature
- US20130202990A1 COATING OF SHIELD SURFACES IN DEPOSITION SYSTEMS Public/Granted day:2013-08-08
Information query
