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US08735849B2 Detector for use in charged-particle microscopy 有权
用于带电粒子显微镜的检测器

Detector for use in charged-particle microscopy
Abstract:
A method of investigating a sample using a charged-particle microscope is disclosed. By directing an imaging beam of charged particles at a sample, a resulting flux of output radiation is detected from the sample. At least a portion of the output radiation is examined using a detector, the detector comprising a Solid State Photo-Multiplier. The Solid State Photo-Multiplier is biased so that its gain is matched to the magnitude of output radiation flux.
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