Invention Grant
- Patent Title: Detector for use in charged-particle microscopy
- Patent Title (中): 用于带电粒子显微镜的检测器
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Application No.: US13396171Application Date: 2012-02-14
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Publication No.: US08735849B2Publication Date: 2014-05-27
- Inventor: Petr Hlavenka , Marek Uncovsky
- Applicant: Petr Hlavenka , Marek Uncovsky
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg; James Wolfe
- Priority: EP11154322 20110214
- Main IPC: H01J37/244
- IPC: H01J37/244

Abstract:
A method of investigating a sample using a charged-particle microscope is disclosed. By directing an imaging beam of charged particles at a sample, a resulting flux of output radiation is detected from the sample. At least a portion of the output radiation is examined using a detector, the detector comprising a Solid State Photo-Multiplier. The Solid State Photo-Multiplier is biased so that its gain is matched to the magnitude of output radiation flux.
Public/Granted literature
- US20120205539A1 Detector for Use in Charged-Particle Microscopy Public/Granted day:2012-08-16
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