-
公开(公告)号：US20090242758A1
公开(公告)日：2009-10-01
申请号：US12059850
申请日：2008-03-31
Applicant: MAREK UNCOVSKY , MILOS TOTH , WILLIAM RALPH KNOWLES
Inventor： MAREK UNCOVSKY , MILOS TOTH , WILLIAM RALPH KNOWLES
CPC classification number: H01J37/244 , H01J37/28 , H01J47/06 , H01J2237/24445 , H01J2237/2448 , H01J2237/2605
Abstract: A novel detector for a charged particle beam system which includes multiple gas amplification stages. The stages are typically defined by conductors to which voltage are applied relative to the sample or to a previous stage. By creating cascades of secondary electrons in multiple stages, the gain can be increased without causing dielectric breakdown of the gas.
Abstract translation: 一种用于带电粒子束系统的新型检测器，其包括多个气体放大级。 这些级通常由相对于样品施加电压的导体或前一级定义。 通过在多级中产生二级电子级联，可以增加增益，而不会导致气体的介质击穿。
-
公开(公告)号：US20120112062A1
公开(公告)日：2012-05-10
申请号：US12942201
申请日：2010-11-09
Applicant: Libor Novak , Marek Uncovsky , Milos Toth , Martin Cafourek , William Parker , Marcus Straw , Mark Emerson
Inventor： Libor Novak , Marek Uncovsky , Milos Toth , Martin Cafourek , William Parker , Marcus Straw , Mark Emerson
CPC classification number: H01J37/20 , H01J37/18 , H01J37/244 , H01J2237/024 , H01J2237/2001 , H01J2237/2003 , H01J2237/2445
Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photon yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable minor.
Abstract translation: 用于带电粒子束系统的环境单元允许安装在X-Y平台上的单元和聚焦列的光轴之间的相对运动，从而消除对单元内的子级的需要。 诸如可伸缩盖的柔性电池构造允许多种工艺，包括光束诱导和热诱导工艺。 在带电粒子束系统中进行的光子产率光谱和使用光电子的气体级联放大允许分析细胞中的材料并监测细胞中的处理。 也可以使用可伸缩的未成年人进行发光分析。
-
Patent Agency Ranking
公开(公告)号：US09679741B2
公开(公告)日：2017-06-13
申请号：US12942201
申请日：2010-11-09
Applicant: Libor Novak , Marek Uncovsky , Milos Toth , Martin Cafourek , William Parker , Marcus Straw , Mark Emerson
Inventor： Libor Novak , Marek Uncovsky , Milos Toth , Martin Cafourek , William Parker , Marcus Straw , Mark Emerson
IPC: G01N23/00 , H01J37/20 , H01J37/18 , H01J37/244
CPC classification number: H01J37/20 , H01J37/18 , H01J37/244 , H01J2237/024 , H01J2237/2001 , H01J2237/2003 , H01J2237/2445
Abstract: An environmental cell for a charged particle beam system allows relative motion between the cell mounted on an X-Y stage and the optical axis of the focusing column, thereby eliminating the need for a sub-stage within the cell. A flexible cell configuration, such as a retractable lid, permits a variety of processes, including beam-induced and thermally-induced processes. Photoelectron yield spectroscopy performed in a charged particle beam system and using gas cascade amplification of the photoelectrons allows analysis of material in the cell and monitoring of processing in the cell. Luminescence analysis can be also performed using a retractable mirror.
-
公开(公告)号：US08735849B2
公开(公告)日：2014-05-27
申请号：US13396171
申请日：2012-02-14
Applicant: Petr Hlavenka , Marek Uncovsky
Inventor： Petr Hlavenka , Marek Uncovsky
IPC: H01J37/244
CPC classification number: H01J37/244 , G01N21/6447 , G01N2201/08 , H01J37/224 , H01J37/226 , H01J37/28 , H01J2237/2441 , H01J2237/2443 , H01J2237/2445 , H01J2237/26 , H01J2237/2605 , H01J2237/2802 , H01J2237/31749
Abstract: A method of investigating a sample using a charged-particle microscope is disclosed. By directing an imaging beam of charged particles at a sample, a resulting flux of output radiation is detected from the sample. At least a portion of the output radiation is examined using a detector, the detector comprising a Solid State Photo-Multiplier. The Solid State Photo-Multiplier is biased so that its gain is matched to the magnitude of output radiation flux.
Abstract translation: 公开了使用带电粒子显微镜研究样品的方法。 通过将带电粒子的成像光束引导到样品，从样品中检测所得到的输出辐射通量。 使用检测器检查输出辐射的至少一部分，该检测器包括固态光电倍增器。 固态光电倍增器偏置，使其增益与输出辐射通量的大小相匹配。
-
公开(公告)号：US20120205539A1
公开(公告)日：2012-08-16
申请号：US13396171
申请日：2012-02-14
Applicant: Petr Hlavenka , Marek Uncovsky
Inventor： Petr Hlavenka , Marek Uncovsky
IPC: H01J37/26
CPC classification number: H01J37/244 , G01N21/6447 , G01N2201/08 , H01J37/224 , H01J37/226 , H01J37/28 , H01J2237/2441 , H01J2237/2443 , H01J2237/2445 , H01J2237/26 , H01J2237/2605 , H01J2237/2802 , H01J2237/31749
Abstract: A method of investigating a sample using a charged-particle microscope is disclosed. By directing an imaging beam of charged particles at a sample, a resulting flux of output radiation is detected from the sample. At least a portion of the output radiation is examined using a detector, the detector comprising a Solid State Photo-Multiplier. The Solid State Photo-Multiplier is biased so that its gain is matched to the magnitude of output radiation flux.
Abstract translation: 公开了使用带电粒子显微镜研究样品的方法。 通过将带电粒子的成像光束引导到样品，从样品中检测所得到的输出辐射通量。 使用检测器检查输出辐射的至少一部分，该检测器包括固态光电倍增器。 固态光电倍增器偏置，使其增益与输出辐射通量的大小相匹配。
-
公开(公告)号：US07791020B2
公开(公告)日：2010-09-07
申请号：US12059850
申请日：2008-03-31
Applicant: Marek Uncovsky , Milos Toth , William Ralph Knowles
Inventor： Marek Uncovsky , Milos Toth , William Ralph Knowles
IPC: H01J37/244 , H01J37/28 , H01J37/252
CPC classification number: H01J37/244 , H01J37/28 , H01J47/06 , H01J2237/24445 , H01J2237/2448 , H01J2237/2605
Abstract: A novel detector for a charged particle beam system which includes multiple gas amplification stages. The stages are typically defined by conductors to which voltage are applied relative to the sample or to a previous stage. By creating cascades of secondary electrons in multiple stages, the gain can be increased without causing dielectric breakdown of the gas.
Abstract translation: 一种用于带电粒子束系统的新型检测器，其包括多个气体放大级。 这些级通常由相对于样品施加电压的导体或前一级定义。 通过在多级中产生二级电子级联，可以增加增益，而不会导致气体的介质击穿。
-
公开(公告)号：US07009187B2
公开(公告)日：2006-03-07
申请号：US10606930
申请日：2003-06-26
Applicant: Robert L. Gerlach , Mark W. Utlaut , Trevor Dingle , Marek Uncovsky
Inventor： Robert L. Gerlach , Mark W. Utlaut , Trevor Dingle , Marek Uncovsky
IPC: G01K1/08
CPC classification number: H01J37/244 , H01J37/3005 , H01J43/06 , H01J49/025
Abstract: A particle detector switchable from an ion detector to an electron detector includes an ion-to-electron converter and a scintillator detector. With one set of voltages on the components, the converter has minimal impact on the electron trajectories so the electrons are efficiently detected by the scintillator detector. With different voltage settings on the components, the detector can be operated in positive ion mode to collect positive ions with adequate efficiency for most FIB applications. The ion-to-electron converter is preferably in the shape of a cylinder or includes multiple parallel plates
Abstract translation: 可从离子检测器切换到电子检测器的粒子检测器包括离子 - 电子转换器和闪烁体检测器。 在组件上具有一组电压，转换器对电子轨迹的影响最小，因此闪烁体检测器有效地检测电子。 通过对组件进行不同的电压设置，检测器可以以正离子模式运行，以便大多数FIB应用能够以足够的效率收集正离子。 离子 - 电子转换器优选为圆柱形或包括多个平行板
-
-
-
-
-
-
Search Results
7
records
(took 0.012 seconds)
