Invention Grant
- Patent Title: Semiconductor device and manufacturing method thereof
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US13767446Application Date: 2013-02-14
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Publication No.: US08736051B2Publication Date: 2014-05-27
- Inventor: Tatsuya Usami , Tomoyuki Nakamura , Naoki Fujimoto
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Kawasaki-shi
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Miles & Stockbridge P.C.
- Priority: JP2012-066739 20120323
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A semiconductor device includes an interlayer insulating film containing Si, O, C, and H, an under-bump metal film disposed over the interlayer insulating film and containing Ni, and a bump electrode disposed over the under-bump metal film. In the interlayer insulating film, a ratio of a peak height of Si—CH3 near a wave number 1270 cm−1 to a peak height of Si—O near a wave number 1030 cm−1 obtained by Fourier-transform infrared spectroscopy (FTIR) is 0.15 or greater and 0.27 or less. A ratio of a peak height of Si—CH2—Si near a wave number 1360 cm−1 to the peak height of Si—CH3 near the wave number 1270 cm−1 is 0.031 or greater.
Public/Granted literature
- US20130249084A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-09-26
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