Invention Grant
- Patent Title: Mass spectrometer and mass spectrometry method
- Patent Title (中): 质谱仪和质谱法
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Application No.: US12952453Application Date: 2010-11-23
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Publication No.: US08742332B2Publication Date: 2014-06-03
- Inventor: Kazuhiko Horikoshi , Naotoshi Akamatsu
- Applicant: Kazuhiko Horikoshi , Naotoshi Akamatsu
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2009-269422 20091127
- Main IPC: H01J49/00
- IPC: H01J49/00

Abstract:
A mass spectrometer and a mass spectrometry method adapted for mass spectrometry of a hardly volatile minuscule organic foreign matter of several μm often causing a device defect are disclosed. A sample gasified by a sample heating probe is introduced into an ion source, and the sample thus ionized is detected by being separated in accordance with the mass-to-charge ratio. In this mass spectrometry technique, the sample heating probe is covered with a cylindrical gas guide mechanism, and the gasified sample is led efficiently to the ion source by the gas guide mechanism, thereby making possible the contribution by the sample components which otherwise might be dispersed and wasted in the prior art. As a result, the mass spectrometry with higher sensitivity and S/N than in the prior art is realized.
Public/Granted literature
- US20110127420A1 MASS SPECTROMETER AND MASS SPECTROMETRY METHOD Public/Granted day:2011-06-02
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