Invention Grant
- Patent Title: Electron microscope
- Patent Title (中): 电子显微镜
-
Application No.: US13505951Application Date: 2010-11-01
-
Publication No.: US08742342B2Publication Date: 2014-06-03
- Inventor: Nobuhiro Okai , Yasunari Sohda
- Applicant: Nobuhiro Okai , Yasunari Sohda
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2009-254553 20091106
- International Application: PCT/JP2010/006424 WO 20101101
- International Announcement: WO2011/055520 WO 20110512
- Main IPC: H01J37/04
- IPC: H01J37/04 ; H01J37/145 ; H01J37/14

Abstract:
A scanning electron microscope suppresses a beam drift by reducing charging on a sample surface while suppressing resolution degradation upon observation of an insulator sample. An electron microscope includes an electron source and an objective lens that focuses an electron beam emitted from the electron source, which provides an image using a secondary signal generated from the sample irradiated with the electron beam. A magnetic body with a continuous structure and an inside diameter larger than an inside diameter of an upper pole piece that forms the objective lens is provided between the objective lens and the sample.
Public/Granted literature
- US20120217393A1 Electron Microscope Public/Granted day:2012-08-30
Information query